L11_A
1.Spring System of Comb Drive Actuator
L11_B
1. Viscous Damping
2. Dynamic Response
L11_C
1. Pull-in Effect for Gap-Closing Actuator
L11_D
1. Buckling of a Long Beam
L11_E
1. Stress of a Long Beam
2. Stiction During Releasing
3. Example of Number Plug in
