L6_A
1. Knowledge required for Micro System Design
2. Typical IC Design Cycle
3. Typical MEMS Design Cycle
L6_B
1. Design Example for the design process
2. Design Concerns for Micro Sensors
3. Design Concerns for Micro Actuators
L6_C
1. Simulator
2. MEMS Layout Software
3. Advantage to use LEDIT
L6_D
1. How to use LEDIT