L7_A
1. MEMS Design Through Foundries
2. MEMS on CMOS Chip Examples
L7_B
1. MUMPS(Multi-User MEMS Process) Examples
2. LIGA Process and Deep Silicon RIE
3. MEMS Design Using MOSIS/SCNA Process
4. Introduction of MOSFET
L7_C
1. I-V Curve of MOSFET
L7_D
1. Layout Process of a CMOS
L7_E
1. MOSIS/SCNA Process Layer Names
2. Design Rules for MOSIS/SCNA 2.0
3. Methods for Fabricating MEMS Device on CMOS Chip