L10_A
1. MCNC/MUMPS Structure
2. Detail Fabrication Process of MCNC/MUMPS_I
L10_B
1. Detail Fabrication Process of MCNC/MUMPS_II
2. MCNC/MUMPS Process Layer Names
3. Design Rules
L10_C
1. Process and Design Issues
2. Possible Structures Made by MCNC/MUMPS
L10_D
1. Electrostatics Actuator/Sensor
L10_E
1. Comb Drive Actuator
