曾繁根 教授
工程與系統科學系
國立清華大學原子科學院 特聘教授 加州大學洛杉磯分校（UCLA）機械航空工程 博士
【經歷】 美國麻省理工學院Koch癌症積體研究中心訪問教授 (2014.8-2015.7) 清華大學全球事務處副全球長兼國際組組長 (2013.2-2014.4)
清華大學工程與系統科學系系主任（2010.1-2013.1)
美國洛杉磯加大積體細胞控制中心訪問教授 (2007.06-09)
【榮譽】 有庠科技論文獎綠色科技類（2014.4） 美國機械工程師協會會士(ASME Fellow) (2014.2)
國家新創獎(2013.12) 國科會傑出研究獎(2010)
【 網站】 fangang.web.nthu.edu.tw 【授課 】 微系統設計、微系統工程原理 、高等微系統製造與實驗 【 專長 】 生醫奈微米機電系統、奈/微米流體及熱傳、微型燃料電池
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This course teachs student to utilize fundamental MEMS/MST (Micro-Electro-Mechanical System/Mciro System Technology)knoweledge combined with MEMS CAD software to design real MEMS/MST devices. Two commercial available MEMS foundries (MOSIS/SCNA and MCNC/MUMPS) ....
Course Description
This course teaches student to utilize fundamental MEMS/MST (Micro-Electro-Mechanical System/Micro System Technology)knowledge combined with MEMS CAD software to design real MEMS/MST devices. Two commercial available MEMS foundries (MOSIS/SCNA and MCNC/MUMPS) and simple physical model on accelerator and combdrive actuator will be elaborated to demonstrate the design process. Finally, The student will combine the knowledge learned from the course to design and present their own MEMS device. This course is offered in English.
Textbooks
♠ Micro System Design Class Notes, Fan-Gang Tseng, please download them at fangang.web.nthu.edu.tw. ♠ CMOS layout design-using L-Edit, (CMOS 實體層設計-使用L-EDIT), by Uyemura, 楊忠煌譯, 高立出 版社, 1998. ♠ Microsystem Design, Stephen D. Senturia, Kluwer Academic Publishers, Boston, 2000.
References
1 Micromachines, a new era in mechanical engineering, Iwao Fujimasa, Oxford Science Publication, 1996. 2 Micro Mechanics and MEMS, classic and seminar papers to 1990, William S. Trimmer, IEEE press, 1997. 3 On Size and Life, T. A. McMahon and J. T. Bonner, Scientific American Library, 1983. 4 Fundamentals of Microfabrication, Marc Madou, CRC Press, 1997 5 Micromachined Transducers source book, Gregory T.A. Kovacs, McGraw Hill, 1998 6 Semiconductor Sensors, S.M. Sze, Wiley Inter. Science, 1994.
Teaching Method
♠ Lectures, CAD software hand on practice, presentations
Syllabus
Tentative Outline for Micro System Design:
1 Scope of the Micro System Design, the current status of Micro System Technology 2 Brief Review of MEMS technology I - Scaling law (hw#1) 3 Brief Review of MEMS technology III- lithography and IC process 4 Brief Review of MEMS technology II- Bulk micromachining (hw#2) 5 Brief Review of MEMS technology IV- Surface micromachining, and others. 6 Midterm#1 7 Introduction and hand-on practice of MEMS design software-LEIDT (hw#3,) ( team formation) 8 IC and MEMS foundry I.-MOSIS 9 Coventerware ( High Speed Computer Centre) 10 Design example I: IC process and Micro accelerometer design using MOSIS process (hw#4) 11 Midterm #2 12 IC and MEMS foundry II.-.Cronos 13 Design example II: Micro comb-drive motor design using MUMPS process (hw#5) 14 Thermal actuator design 15 Special topics on MEMS design 16 Final presentation ♠ Final report due: one week after the final presentation
