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第7講 MEMS Design Through Foundries

 L7_A
       1. MEMS Design Through Foundries
       2. MEMS on CMOS Chip Examples



L7_B

       1. MUMPS(Multi-User MEMS Process) Examples
       2. LIGA Process and Deep Silicon RIE 
       3. MEMS Design Using MOSIS/SCNA Process
       4. Introduction of MOSFET

 

L7_C
       1. I-V Curve of MOSFET



L7_D
       1. Layout Process of a CMOS

 


L7_E
       1. MOSIS/SCNA Process Layer Names 
       2. Design Rules for MOSIS/SCNA 2.0
       3. Methods for Fabricating MEMS Device on CMOS Chip

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