開放式課程>>工程學群>>微系統設計>>第5講 Review: Crystal Direction of <100> Silicon Wafer

第5講 Review: Crystal Direction of <100> Silicon Wafer

 L5_A
        1. Review: Crystal Direction of <100> Silicon Wafer
        2. Etched Cavity in a <110> Silicon Wafer_ Example 1


L5_B
        1. Etched Cavity in a <110> Silicon Wafer_ Example 2
        2. Summary of Possible Shape by Bulk Etching <100>
            or <110> Wafers
 

L5_C
      1. Etch Stop
      2. Silicon Dry Etching

 
L5_D
      1. Surface Micromachining
      2. Properties of Polysilicon (16:11後跳掉)

 
L5_E
      1. Stiction

 
L5_F
      1. Testing Structures
 

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