This course teachs student to utilize fundamental MEMS/MST (Micro-Electro-Mechanical System/Mciro System Technology)knoweledge combined with MEMS CAD software to design real MEMS/MST devices. Two commercial available MEMS foundries (MOSIS/SCNA and MCNC/MUMPS) ....
Course Description
This course teaches student to utilize fundamental MEMS/MST (Micro-Electro-Mechanical System/Micro System Technology)knowledge combined with MEMS CAD software to design real MEMS/MST devices. Two commercial available MEMS foundries (MOSIS/SCNA and MCNC/MUMPS) and simple physical model on accelerator and combdrive actuator will be elaborated to demonstrate the design process. Finally, The student will combine the knowledge learned from the course to design and present their own MEMS device. This course is offered in English.
Textbooks
References
Teaching Method
| ♠ | Lectures, CAD software hand on practice, presentations |
Syllabus
Tentative Outline for Micro System Design:
| 1 | Scope of the Micro System Design, the current status of Micro System Technology | |
| 2 | Brief Review of MEMS technology I - Scaling law (hw#1) | |
| 3 | Brief Review of MEMS technology III- lithography and IC process | |
| 4 | Brief Review of MEMS technology II- Bulk micromachining (hw#2) | |
| 5 | Brief Review of MEMS technology IV- Surface micromachining, and others. | |
| 6 | Midterm#1 | |
| 7 | Introduction and hand-on practice of MEMS design software-LEIDT (hw#3,) ( team formation) | |
| 8 | IC and MEMS foundry I.-MOSIS | |
| 9 | Coventerware ( High Speed Computer Centre) | |
| 10 | Design example I: IC process and Micro accelerometer design using MOSIS process (hw#4) | |
| 11 | Midterm #2 | |
| 12 | IC and MEMS foundry II.-.Cronos | |
| 13 | Design example II: Micro comb-drive motor design using MUMPS process (hw#5) | |
| 14 | Thermal actuator design | |
| 15 | Special topics on MEMS design (Micro Droplet generator, BioMEMS and Micro Fluidics) | |
| 16 | Final presentation | |
| ♠ | Final report due: one week after the final presentation |
