L5_A
1. Review: Crystal Direction of <100> Silicon Wafer
2. Etched Cavity in a <110> Silicon Wafer_ Example 1
L5_B
1. Etched Cavity in a <110> Silicon Wafer_ Example 2
2. Summary of Possible Shape by Bulk Etching <100>
or <110> Wafers
or <110> Wafers
L5_C
1. Etch Stop
1. Etch Stop
2. Silicon Dry Etching
L5_D
1. Surface Micromachining
2. Properties of Polysilicon (16:11後跳掉)
L5_E
1. Stiction
L5_F
1. Testing Structures
