This course teachs student to utilize fundamental MEMS/MST (Micro-Electro-Mechanical System/Mciro System Technology)knoweledge combined with MEMS CAD software to design real MEMS/MST devices. Two commercial available MEMS foundries (MOSIS/SCNA and MCNC/MUMPS) ....
【 Course Description 】
This course teachs student to utilize fundamental MEMS/MST (Micro-Electro-Mechanical System/Mciro System Technology)knoweledge combined with MEMS CAD software to design real MEMS/MST devices. Two commercial available MEMS foundries (MOSIS/SCNA and MCNC/MUMPS) and simple physical model on accelerator and combdrive actuator will be elaborated to demonstrate the design process. Finally, The student will combine the knoweledge learned from the course to design and present their own MEMS device. This course is offered in English.
【 Textbooks 】
| 1 | Micro System Design Class Notes, Fan-Gang Tseng, please download them at fangang.web.nthu.edu.tw.
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| 2 | CMOS layout design-using L-Edit, (CMOS 實體層設計-使用L-EDIT), by Uyemura, 楊忠煌譯, 高立出 版社, 1998.
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| 3 | Microsystem Design, Stephen D. Senturia, Kluwer Academic Publishers, Boston, 2000. |
【 References 】
| 1 | Micromachines, a new era in mechanical engineering, Iwao Fujimasa, Oxford Science Publication, 1996.
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| 2 | Micro Mechanics and MEMS, classic and seminar papers to 1990, William S. Trimmer, IEEE press, 1997.
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| 3 | On Size and Life, T. A. McMahon and J. T. Bonner, Scientific American Library, 1983.
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| 4 | Fundamentals of Microfabrication, Marc Madou, CRC Press, 1997
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| 5 | Micromachined Transducers source book, Gregory T.A. Kovacs, McGraw Hill, 1998
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| 6 | Semiconductor Sensors, S.M. Sze, Wiley Inter. Science, 1994. |
【 Teaching Method 】
Lectures, CAD software hand on practice, presentations
【Syllabus 】
Tentative Outline for Micro System Design:
| 1 | Scope of the Micro System Design, the current status of Micro System Technology
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| 2 | Brief Review of MEMS technology I - Scaling law (hw#1)
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| 3 | Brief Review of MEMS technology III- lithography and IC process
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| 4 | Brief Review of MEMS technology II- Bulk micromachining (hw#2)
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| 5 | Brief Review of MEMS technology IV- Surface micromachining, and others.
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| 6 | Midterm#1
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| 7 | Introduction and hand-on practice of MEMS design software-LEIDT (hw#3,) ( team formation)
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| 8 | IC and MEMS foundry I.-MOSIS
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| 9 | Coventerware ( High Speed Computer Centre)
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| 10 | Design example I: IC process and Micro accelerometer design using MOSIS process (hw#4)
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| 11 | Midterm #2
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| 12 | IC and MEMS foundry II.-.Cronos
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| 13 | Design example II: Micro comb-drive motor design using MUMPS process (hw#5)
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| 14 | Thermal actuator design
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| 15 | Special topics on MEMS design (Micro Droplet generator, BioMEMS and Micro Fluidics)
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| 16 | Final presentation
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| ＊ | Final report due: one week after the final presentation | |
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