開放式課程>>工程學群>>微系統設計>>第10講 MCNC/MUMPS Structure

第10講 MCNC/MUMPS Structure

 L10_A 
         1. MCNC/MUMPS Structure
         2. Detail Fabrication Process of MCNC/MUMPS_I

 
L10_B 
         1. Detail Fabrication Process of MCNC/MUMPS_II
         2. MCNC/MUMPS Process Layer Names
         3. Design Rules

 
L10_C 
         1. Process and Design Issues
         2. Possible Structures Made by MCNC/MUMPS

 
L10_D 
         1. Electrostatics Actuator/Sensor
 
 
L10_E 
         1. Comb Drive Actuator 

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