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第3講 NMOS Transistor Structure and Process

 L3_A 
        1. NMOS Transistor Structure and Process

 
L3_B 
        1. CMOS Transistor Process
        2. Lithography
        3. Etching Techniques
 
L3_C
        1. Exposure Process
        2. Thermal Oxidation
 
L3_D 
        1. Selective Oxidation
        2. Diffusion Process
        3. Junction-Depth Measurement
        4. Sheet Resistance
 
L3_E 
        1. Diffusion System
        2. Dopant Redistribution during Oxidation
 
L3_F
        1. Physical Vapor Deposition
        2. Chemical Vapor Deposition
 

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